{"id":6224,"date":"2025-10-02T17:52:27","date_gmt":"2025-10-02T09:52:27","guid":{"rendered":"https:\/\/www.ukm.my\/imen\/?page_id=6224"},"modified":"2025-11-30T17:45:56","modified_gmt":"2025-11-30T09:45:56","slug":"mems-nems-lab","status":"publish","type":"page","link":"https:\/\/www.ukm.my\/imen\/mems-nems-lab\/","title":{"rendered":"MEMS\/NEMS Lab"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"6224\" class=\"elementor elementor-6224\" data-elementor-post-type=\"page\">\n\t\t\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" class=\"elementor-element elementor-element-2cf7138a e-flex e-con-boxed e-con e-parent\" data-id=\"2cf7138a\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-12579934 elementor-widget elementor-widget-heading\" data-id=\"12579934\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">MEMS\/NEMS LAB.<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" class=\"elementor-element elementor-element-15343318 e-flex e-con-boxed e-con e-parent\" data-id=\"15343318\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" class=\"elementor-element elementor-element-6b797087 e-con-full e-flex e-con e-child\" data-id=\"6b797087\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-10d64b39 elementor-widget elementor-widget-image\" data-id=\"10d64b39\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"1024\" src=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/10\/Gambar-Utama_Mems-1-1024x1024.png\" class=\"attachment-large size-large wp-image-6316\" alt=\"\" srcset=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/10\/Gambar-Utama_Mems-1-1024x1024.png 1024w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/10\/Gambar-Utama_Mems-1-300x300.png 300w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/10\/Gambar-Utama_Mems-1-150x150.png 150w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/10\/Gambar-Utama_Mems-1-768x768.png 768w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/10\/Gambar-Utama_Mems-1.png 1084w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" class=\"elementor-element elementor-element-ca18b94 e-con-full e-flex e-con e-child\" data-id=\"ca18b94\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" class=\"elementor-element elementor-element-30fc12a4 e-con-full e-flex e-con e-child\" data-id=\"30fc12a4\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-707cf5f2 elementor-widget elementor-widget-text-editor\" data-id=\"707cf5f2\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<ul><li><p>Research in this laboratory focuses on the development of high-performance, low-cost, miniature electromechanical and electronic devices. We design and fabricate miniature sensors and actuator systems using CMOS-compatible processes, while research on nanoelectronics emphasizes 2D and carbon-based materials integrated with advanced nanostructures. Other areas of interest include silicon and compound semiconductors, nanometer-scale MEMS devices (NEMS), and MEMS technologies for biomedical applications.<\/p><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" class=\"elementor-element elementor-element-b85aa78 e-con-full e-flex e-con e-child\" data-id=\"b85aa78\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" class=\"elementor-element elementor-element-60c2d67b e-grid e-con-full e-con e-child\" data-id=\"60c2d67b\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-7f7ffd49 eael-team-align-centered elementor-widget elementor-widget-eael-team-member\" data-id=\"7f7ffd49\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"eael-team-member.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\n\n\t<div id=\"eael-team-member-7f7ffd49\" class=\"eael-team-item eael-team-members-circle \">\n\t\t<div class=\"eael-team-item-inner\">\n\t\t\t<div class=\"eael-team-image\">\n\t\t\t\t<figure>\n\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" src=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/theme_pbym-150x150.png\" alt=\"\">\n\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\n\t\t\t\t\n\t\t\t<\/div>\n\n\t\t\t<div class=\"eael-team-content\">\n\t\t\t\t<h2 class=\"eael-team-member-name\">Head of Laboratory<\/h2><h3 class=\"eael-team-member-position\">Prof. Dato'. Dr. Burhanuddin Yeop Majlis<\/h3>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<p class=\"eael-team-text\">\nburhan@ukm.edu.my<\/p>\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6eb9cf38 eael-team-align-eael-team-align-default elementor-widget elementor-widget-eael-team-member\" data-id=\"6eb9cf38\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"eael-team-member.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\n\n\t<div id=\"eael-team-member-6eb9cf38\" class=\"eael-team-item eael-team-members-circle \">\n\t\t<div class=\"eael-team-item-inner\">\n\t\t\t<div class=\"eael-team-image\">\n\t\t\t\t<figure>\n\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" src=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/so_izzah-150x150.png\" alt=\"\">\n\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\n\t\t\t\t\n\t\t\t<\/div>\n\n\t\t\t<div class=\"eael-team-content\">\n\t\t\t\t<h2 class=\"eael-team-member-name\">PIC Laboratory<\/h2><h3 class=\"eael-team-member-position\">Nurul Izzah Zakaria<\/h3>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<p class=\"eael-team-text\">nurul_izzah@ukm.edu.my<\/p>\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" class=\"elementor-element elementor-element-16d4cd27 e-flex e-con-boxed e-con e-parent\" data-id=\"16d4cd27\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-527d3a61 elementor-widget elementor-widget-heading\" data-id=\"527d3a61\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">EQUIPMENT \/ FACILITIES<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-64695415 elementor-widget elementor-widget-n-accordion\" data-id=\"64695415\" data-element_type=\"widget\" data-e-type=\"widget\" data-settings=\"{&quot;default_state&quot;:&quot;expanded&quot;,&quot;max_items_expended&quot;:&quot;one&quot;,&quot;n_accordion_animation_duration&quot;:{&quot;unit&quot;:&quot;ms&quot;,&quot;size&quot;:400,&quot;sizes&quot;:[]}}\" data-widget_type=\"nested-accordion.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"e-n-accordion\" aria-label=\"Accordion. Open links with Enter or Space, close with Escape, and navigate with Arrow Keys\">\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-1680\" class=\"e-n-accordion-item\" open>\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"1\" tabindex=\"0\" aria-expanded=\"true\" aria-controls=\"e-n-accordion-item-1680\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Field Emission Scanning Electron Microscopy (Sigma HD FESEM System) <\/div><\/span>\n\t\t\t\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1680\" class=\"elementor-element elementor-element-1f39b6ce e-con-full e-flex e-con e-child\" data-id=\"1f39b6ce\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1680\" class=\"elementor-element elementor-element-2e5248e3 e-flex e-con-boxed e-con e-child\" data-id=\"2e5248e3\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-193a5d94 elementor-widget elementor-widget-image\" data-id=\"193a5d94\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"300\" height=\"300\" src=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/10\/FESEM-300x300.png\" class=\"attachment-medium size-medium wp-image-6323\" alt=\"\" srcset=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/10\/FESEM-300x300.png 300w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/10\/FESEM-150x150.png 150w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/10\/FESEM.png 394w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3da0c305 elementor-widget elementor-widget-text-editor\" data-id=\"3da0c305\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>A high-resolution imaging system that uses a field emission electron source to provide detailed surface morphology and structural analysis of materials at the nanoscale.<\/p><p><strong>\u00a0<\/strong><\/p><p><strong>How it works\/principle<\/strong><\/p><ul><li>A focused electron beam, generated by a field emission gun (FEG), is scanned across the sample surface under vacuum.<\/li><li>Interactions between the electron beam and the sample produce secondary electrons, backscattered electrons, and other signals.<\/li><li>These signals are collected and converted into high-resolution images, revealing topography, composition, and surface features.<\/li><\/ul><p><strong>\u00a0<\/strong><\/p><p><strong>Key features\/ advantage<\/strong><\/p><ul><li>Ultra-high resolution imaging of nanostructures and fine surface details.<\/li><li>Field emission source provides superior brightness and beam stability.<\/li><li>Multiple detectors (secondary, backscattered, EDS) for versatile imaging and elemental analysis.<\/li><li>Large depth of field for 3D-like imaging of rough surfaces.<\/li><li>User-friendly interface with advanced automation for efficient operation.<\/li><li>Suitable for both conductive and non-conductive samples (with coating).<\/li><\/ul><p><strong>\u00a0<\/strong><\/p><p><strong>Application<\/strong><\/p><ul><li>Nanomaterials characterization (particles, fibers, thin films).<\/li><li>Surface morphology and microstructural studies.<\/li><li>Failure analysis and defect inspection in semiconductors and devices.<\/li><li>Biological sample imaging (with preparation\/coating).<\/li><li>Correlative imaging with EDS for elemental and compositional analysis.<\/li><li>Research in materials science, nanotechnology, life sciences, and microelectronics<\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-1681\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"2\" tabindex=\"-1\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-1681\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Xenon Dry Etching System (Samco VPE-4F XeF2 dry etching system) <\/div><\/span>\n\t\t\t\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1681\" class=\"elementor-element elementor-element-8d30bd9 e-con-full e-flex e-con e-child\" data-id=\"8d30bd9\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1681\" class=\"elementor-element elementor-element-3b01253 e-flex e-con-boxed e-con e-child\" data-id=\"3b01253\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-7618ab8 elementor-widget elementor-widget-image\" data-id=\"7618ab8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"300\" height=\"300\" src=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-300x300.png\" class=\"attachment-medium size-medium wp-image-6090\" alt=\"\" srcset=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-300x300.png 300w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-150x150.png 150w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem.png 383w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c9f0330 elementor-widget elementor-widget-text-editor\" data-id=\"c9f0330\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>A specialized dry etching system utilizing xenon difluoride (XeF\u2082) gas for isotropic etching of silicon and related materials, widely used in MEMS and semiconductor fabrication.<\/p><p><strong>\u00a0<\/strong><\/p><p><strong>How it works\/principle<\/strong><\/p><ul><li>XeF\u2082 gas is introduced into the etching chamber under vacuum conditions.<\/li><li>The gas reacts spontaneously with exposed silicon surfaces to form volatile SiF\u2084 byproducts, which are removed via the vacuum system.<\/li><li>The process is isotropic, highly selective to silicon, and does not require plasma, thus minimizing damage to sensitive structures.<\/li><\/ul><p><strong>\u00a0<\/strong><\/p><p><strong>Key features\/ advantage<\/strong><\/p><ul><li>Plasma-free, room-temperature operation, reducing thermal and ion damage.<\/li><li>High selectivity for silicon with negligible attack on common mask materials (SiO\u2082, Si\u2083N\u2084, metals, photoresist).<\/li><li>Isotropic etching capability for undercut and release processes.<\/li><li>Precise, controllable etch depth through pulsed gas delivery.<\/li><li>User-friendly system with automated recipe control and high process reproducibility.<\/li><\/ul><p><strong>A<\/strong><strong>pplication<\/strong><\/p><ul><li style=\"list-style-type: none;\"><ul><li>MEMS device fabrication (e.g., sacrificial layer release, cavity formation).<\/li><li>Silicon undercutting for free-standing structures.<\/li><li>Etching of high-aspect-ratio microstructures.<\/li><li>Research and development in microelectronics, sensors, and microfluidic devices.<\/li><li>Fabrication of complex 3D silicon-based nanostructures.<\/li><\/ul><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-1682\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"3\" tabindex=\"-1\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-1682\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Spin Coater (CY-SP4) <\/div><\/span>\n\t\t\t\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1682\" class=\"elementor-element elementor-element-cfef2db e-con-full e-flex e-con e-child\" data-id=\"cfef2db\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1682\" class=\"elementor-element elementor-element-0894d51 e-flex e-con-boxed e-con e-child\" data-id=\"0894d51\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-229b31c elementor-widget elementor-widget-image\" data-id=\"229b31c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"300\" height=\"300\" src=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-300x300.png\" class=\"attachment-medium size-medium wp-image-6090\" alt=\"\" srcset=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-300x300.png 300w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-150x150.png 150w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem.png 383w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-94944f7 elementor-widget elementor-widget-text-editor\" data-id=\"94944f7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<ul><li><p>A compact and versatile spin coating system (CY-SP4) designed for producing uniform thin films on substrates with precise control of coating parameters.<\/p><p><strong>\u00a0<\/strong><\/p><p><strong>How it works\/principle<\/strong><\/p><ul><li>A small volume of liquid solution is dispensed onto a substrate.<\/li><li>The substrate is spun at controlled speeds, spreading the solution evenly by centrifugal force.<\/li><li>The final film thickness and uniformity are determined by spin speed, acceleration, and coating time.<\/li><\/ul><p><strong>Key features\/ advantage<\/strong><\/p><ul><li>Wide programmable spin speed range with high accuracy and repeatability.<\/li><li>Easy-to-use digital control panel for setting speed, acceleration, and duration.<\/li><li>Compact footprint, suitable for various lab environments.<\/li><li>Compatible with different substrate sizes and materials.<\/li><li>Reliable and consistent film deposition for research and development.<\/li><\/ul><p><strong>\u00a0<\/strong><\/p><p><strong>Application<\/strong><\/p><ul><li>Deposition of photoresist layers for micro- and nanofabrication.<\/li><li>Preparation of polymer, sol-gel, and organic\/inorganic thin films.<\/li><li>Fabrication of coatings for optoelectronic devices, sensors, and solar cells.<\/li><li>Research in nanotechnology, material science and semiconductor processing<\/li><\/ul><p>\u00a0<\/p><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-1683\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"4\" tabindex=\"-1\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-1683\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Plasma Sputtering Coater  (CY-PSP180G-2TA) <\/div><\/span>\n\t\t\t\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1683\" class=\"elementor-element elementor-element-44900f0 e-con-full e-flex e-con e-child\" data-id=\"44900f0\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1683\" class=\"elementor-element elementor-element-02faa99 e-flex e-con-boxed e-con e-child\" data-id=\"02faa99\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-10addcb elementor-widget elementor-widget-image\" data-id=\"10addcb\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"300\" height=\"300\" src=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-300x300.png\" class=\"attachment-medium size-medium wp-image-6090\" alt=\"\" srcset=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-300x300.png 300w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-150x150.png 150w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem.png 383w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c047a13 elementor-widget elementor-widget-text-editor\" data-id=\"c047a13\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<ul><li><p>A scanning electron microscope for fast characterization and high-resolution imaging of a wide variety of sample types.\u00a0<\/p><ul><li><p><b>How It Works \/ Principle<\/b> It uses a highly focused beam of electrons to scan a sample&#8217;s surface. By detecting the scattered or emitted electrons and X-rays, it creates a detailed image and can analyze the sample&#8217;s composition.<\/p><\/li><li><p><b>Key Features &amp; Advantages<\/b><\/p><ul><li><p><b>Magnification:<\/b> 5x to 300,000x<\/p><\/li><li><p><b>High-Voltage Resolution:<\/b> Up to 3.0 nm<\/p><\/li><li><p><b>Max Sample Size:<\/b> 150 mm diameter<\/p><\/li><li><p><b>Low Vacuum Mode:<\/b> Allows for observation of non-conductive samples without coating.<\/p><\/li><\/ul><\/li><li><p><b>Applications<\/b> Imaging fine features of integrated circuits (ICs) and monitoring the quality of thin films, photoresist patterns, and etching processes at the nanoscale.<\/p><\/li><\/ul><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-1684\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"5\" tabindex=\"-1\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-1684\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> LCR Meter (GW Instek LCR6020) <\/div><\/span>\n\t\t\t\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1684\" class=\"elementor-element elementor-element-188fe7d e-con-full e-flex e-con e-child\" data-id=\"188fe7d\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1684\" class=\"elementor-element elementor-element-2f00590 e-flex e-con-boxed e-con e-child\" data-id=\"2f00590\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-707bac8 elementor-widget elementor-widget-image\" data-id=\"707bac8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"300\" height=\"300\" src=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-300x300.png\" class=\"attachment-medium size-medium wp-image-6090\" alt=\"\" srcset=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-300x300.png 300w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-150x150.png 150w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem.png 383w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fd851f4 elementor-widget elementor-widget-text-editor\" data-id=\"fd851f4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<ul><li><p>A scanning electron microscope for fast characterization and high-resolution imaging of a wide variety of sample types.\u00a0<\/p><ul><li><p><b>How It Works \/ Principle<\/b> It uses a highly focused beam of electrons to scan a sample&#8217;s surface. By detecting the scattered or emitted electrons and X-rays, it creates a detailed image and can analyze the sample&#8217;s composition.<\/p><\/li><li><p><b>Key Features &amp; Advantages<\/b><\/p><ul><li><p><b>Magnification:<\/b> 5x to 300,000x<\/p><\/li><li><p><b>High-Voltage Resolution:<\/b> Up to 3.0 nm<\/p><\/li><li><p><b>Max Sample Size:<\/b> 150 mm diameter<\/p><\/li><li><p><b>Low Vacuum Mode:<\/b> Allows for observation of non-conductive samples without coating.<\/p><\/li><\/ul><\/li><li><p><b>Applications<\/b> Imaging fine features of integrated circuits (ICs) and monitoring the quality of thin films, photoresist patterns, and etching processes at the nanoscale.<\/p><\/li><\/ul><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-1685\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"6\" tabindex=\"-1\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-1685\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Electron Beam Lithography System (Advanced SEM\/FIB Nanolithography) <\/div><\/span>\n\t\t\t\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1685\" class=\"elementor-element elementor-element-3ef9b80 e-con-full e-flex e-con e-child\" data-id=\"3ef9b80\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1685\" class=\"elementor-element elementor-element-25d04dc e-flex e-con-boxed e-con e-child\" data-id=\"25d04dc\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-242c8e7 elementor-widget elementor-widget-image\" data-id=\"242c8e7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"300\" height=\"300\" src=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-300x300.png\" class=\"attachment-medium size-medium wp-image-6090\" alt=\"\" srcset=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-300x300.png 300w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-150x150.png 150w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem.png 383w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2d80f85 elementor-widget elementor-widget-text-editor\" data-id=\"2d80f85\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<ul><li><p>A scanning electron microscope for fast characterization and high-resolution imaging of a wide variety of sample types.\u00a0<\/p><ul><li><p><b>How It Works \/ Principle<\/b> It uses a highly focused beam of electrons to scan a sample&#8217;s surface. By detecting the scattered or emitted electrons and X-rays, it creates a detailed image and can analyze the sample&#8217;s composition.<\/p><\/li><li><p><b>Key Features &amp; Advantages<\/b><\/p><ul><li><p><b>Magnification:<\/b> 5x to 300,000x<\/p><\/li><li><p><b>High-Voltage Resolution:<\/b> Up to 3.0 nm<\/p><\/li><li><p><b>Max Sample Size:<\/b> 150 mm diameter<\/p><\/li><li><p><b>Low Vacuum Mode:<\/b> Allows for observation of non-conductive samples without coating.<\/p><\/li><\/ul><\/li><li><p><b>Applications<\/b> Imaging fine features of integrated circuits (ICs) and monitoring the quality of thin films, photoresist patterns, and etching processes at the nanoscale.<\/p><\/li><\/ul><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-1686\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"7\" tabindex=\"-1\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-1686\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Laser Displacement Meter (LC2400A (Keyence) <\/div><\/span>\n\t\t\t\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1686\" class=\"elementor-element elementor-element-5fdb0ca e-con-full e-flex e-con e-child\" data-id=\"5fdb0ca\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1686\" class=\"elementor-element elementor-element-1d46862 e-flex e-con-boxed e-con e-child\" data-id=\"1d46862\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-87cf558 elementor-widget elementor-widget-image\" data-id=\"87cf558\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"300\" height=\"300\" src=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-300x300.png\" class=\"attachment-medium size-medium wp-image-6090\" alt=\"\" srcset=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-300x300.png 300w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-150x150.png 150w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem.png 383w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-38a3274 elementor-widget elementor-widget-text-editor\" data-id=\"38a3274\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<ul><li><p>A scanning electron microscope for fast characterization and high-resolution imaging of a wide variety of sample types.\u00a0<\/p><ul><li><p><b>How It Works \/ Principle<\/b> It uses a highly focused beam of electrons to scan a sample&#8217;s surface. By detecting the scattered or emitted electrons and X-rays, it creates a detailed image and can analyze the sample&#8217;s composition.<\/p><\/li><li><p><b>Key Features &amp; Advantages<\/b><\/p><ul><li><p><b>Magnification:<\/b> 5x to 300,000x<\/p><\/li><li><p><b>High-Voltage Resolution:<\/b> Up to 3.0 nm<\/p><\/li><li><p><b>Max Sample Size:<\/b> 150 mm diameter<\/p><\/li><li><p><b>Low Vacuum Mode:<\/b> Allows for observation of non-conductive samples without coating.<\/p><\/li><\/ul><\/li><li><p><b>Applications<\/b> Imaging fine features of integrated circuits (ICs) and monitoring the quality of thin films, photoresist patterns, and etching processes at the nanoscale.<\/p><\/li><\/ul><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t\t<details id=\"e-n-accordion-item-1687\" class=\"e-n-accordion-item\" >\n\t\t\t\t<summary class=\"e-n-accordion-item-title\" data-accordion-index=\"8\" tabindex=\"-1\" aria-expanded=\"false\" aria-controls=\"e-n-accordion-item-1687\" >\n\t\t\t\t\t<span class='e-n-accordion-item-title-header'><div class=\"e-n-accordion-item-title-text\"> Shaker LDS (V406)\/ Shaker Controller (LDS B-40) <\/div><\/span>\n\t\t\t\t\t\t\t\t\t<\/summary>\n\t\t\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1687\" class=\"elementor-element elementor-element-e8815f9 e-con-full e-flex e-con e-child\" data-id=\"e8815f9\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" role=\"region\" aria-labelledby=\"e-n-accordion-item-1687\" class=\"elementor-element elementor-element-1f2dcc9 e-flex e-con-boxed e-con e-child\" data-id=\"1f2dcc9\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-563aef4 elementor-widget elementor-widget-image\" data-id=\"563aef4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"300\" height=\"300\" src=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-300x300.png\" class=\"attachment-medium size-medium wp-image-6090\" alt=\"\" srcset=\"https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-300x300.png 300w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem-150x150.png 150w, https:\/\/www.ukm.my\/imen\/wp-content\/uploads\/2025\/09\/inst_sem.png 383w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d4693b3 elementor-widget elementor-widget-text-editor\" data-id=\"d4693b3\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<ul><li><p>A scanning electron microscope for fast characterization and high-resolution imaging of a wide variety of sample types.\u00a0<\/p><ul><li><p><b>How It Works \/ Principle<\/b> It uses a highly focused beam of electrons to scan a sample&#8217;s surface. By detecting the scattered or emitted electrons and X-rays, it creates a detailed image and can analyze the sample&#8217;s composition.<\/p><\/li><li><p><b>Key Features &amp; Advantages<\/b><\/p><ul><li><p><b>Magnification:<\/b> 5x to 300,000x<\/p><\/li><li><p><b>High-Voltage Resolution:<\/b> Up to 3.0 nm<\/p><\/li><li><p><b>Max Sample Size:<\/b> 150 mm diameter<\/p><\/li><li><p><b>Low Vacuum Mode:<\/b> Allows for observation of non-conductive samples without coating.<\/p><\/li><\/ul><\/li><li><p><b>Applications<\/b> Imaging fine features of integrated circuits (ICs) and monitoring the quality of thin films, photoresist patterns, and etching processes at the nanoscale.<\/p><\/li><\/ul><\/li><\/ul>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/details>\n\t\t\t\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div data-particle_enable=\"false\" data-particle-mobile-disabled=\"false\" 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